Monsieur Roger DELATTRE / PhD

Contact details

Professional experience

Jobs

Availability : 2 2013

Mobility : Tous les pays

Research : OUI

PhD

Title : SCIENCES DES MATERIAUX, PHYSIQUE, CHIMIE ET NANOSCIENCES

First registration date : 1 October 2009 / 4A

Doctoral school : Physique et Sciences de la Matière

Thesis defense date : 26 April 2013

Subject : Etude et simulation de la siliciuration du cobalt en couches minces pour la microélectronique : cinétique de formation, contraintes, texture et redistribution des dopants

Thesis supervisor : THOMAS Olivier

Thesis co-supervisor : PERRIN-PELLEGRINO Carine

Research unit : IM2NP - Institut Matériaux Microélectronique Nanosciences de Provence

Master's degree

Title : Micro et nanotechnologies

September 2009 - Université Paris Sud XI

Publications

  • In-situ study and modeling of the decreasing reaction rate at the end of CoSi2 formation
    Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International, 2011
    R. Delattre, R. Simola, C. Rivero, C. Perrin-Pellegrino, O. Thomas
    http://dx.doi.org/10.1109/IITC.2011.5940309
  • CoSi2 ultra-thin layer formation kinetics and texture from X-ray diffraction
    Thin Solid Films, 2012
    R. Delattre, R. Simola, C. Rivero, C. Perrin-Pellegrino, O. Thomas
    http://dx.doi.org/10.1016/j.tsf.2012.10.128
  • Decreasing reaction rate at the end of silicidation : in-situ CoSi2 XRD study and modeling
    Microelectronic Engineering, 2013
    R. Delattre, R. Simola, C. Rivero, C. Perrin-Pellegrino, O. Thomas
    http://dx.doi.org/10.1016/j.mee.2013.01.003

Languages

Anglais : C1 - Avancé

Portugais : C2 - Courant